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TSMC prioritizing high-NA EUV scanners for R&D
Thursday November 7, 2024. 06:59 PM , from TheRegister
May not see full use until 2030 – even if it arrives this year
Taiwan Semiconductor Manufacturing Company is prioritizing, among its manufacturing tools, the acquisition of high numerical aperture extreme ultraviolet scanners for research and development.…
https://go.theregister.com/feed/www.theregister.com/2024/11/07/tsmc_highna_euv/
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